Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429782 | Substrate processing apparatus and substrate processing method | — | 2025-09-30 |
| 12315752 | Substrate treatment apparatus and transfer schedule creation method | Yuichiro Kawasaki | 2025-05-27 |
| 11915959 | Substrate treatment apparatus and transfer schedule creation method | Yuichiro Kawasaki | 2024-02-27 |
| 11139189 | Substrate processing apparatus and substrate processing method | — | 2021-10-05 |
| 10884337 | Substrate processing apparatus and substrate processing method | — | 2021-01-05 |
| 9153467 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable storage medium | — | 2015-10-06 |
| 9004788 | Substrate processing apparatus, substrate processing method, and storage medium | Tomohiro Kaneko | 2015-04-14 |
| 8916229 | Substrate processing method | Akira Miyata, Kunie Ogata | 2014-12-23 |
| 8588952 | Substrate processing system, substrate processing method and storage medium | Takeshi Matsumoto | 2013-11-19 |
| 8560108 | Substrate processing apparatus and substrate processing method | Takeshi Matsumoto | 2013-10-15 |
| 8448600 | Substrate processing apparatus, substrate processing method, and storage medium | Tomohiro Kaneko | 2013-05-28 |