Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315752 | Substrate treatment apparatus and transfer schedule creation method | Kenichirou Matsuyama | 2025-05-27 |
| 11915959 | Substrate treatment apparatus and transfer schedule creation method | Kenichirou Matsuyama | 2024-02-27 |