Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8231285 | Substrate processing method and apparatus | Kunie Ogata, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2012-07-31 |
| 7780366 | Resist pattern forming method | Kunie Ogata, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2010-08-24 |
| 7488127 | Resist pattern forming apparatus and method thereof | Kunie Ogata, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2009-02-10 |
| 6984477 | Resist pattern forming apparatus and method thereof | Kunie Ogata, Hiroshi Tomita, Yoshio Kimura, Ryouichi Uemura, Michio Tanaka | 2006-01-10 |
| 6281962 | Processing apparatus for coating substrate with resist and developing exposed resist including inspection equipment for inspecting substrate and processing method thereof | Kunie Ogata | 2001-08-28 |