Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8231285 | Substrate processing method and apparatus | Kunie Ogata, Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Michio Tanaka | 2012-07-31 |
| 7780366 | Resist pattern forming method | Kunie Ogata, Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Michio Tanaka | 2010-08-24 |
| 7488127 | Resist pattern forming apparatus and method thereof | Kunie Ogata, Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Michio Tanaka | 2009-02-10 |
| 7031792 | Processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Kunie Ogata, Yoichi Deguchi | 2006-04-18 |
| 6990380 | Substrate processing apparatus and information storage apparatus and method | Yuji Yoshimoto, Kunie Ogata, Yoichi Deguchi | 2006-01-24 |
| 6984477 | Resist pattern forming apparatus and method thereof | Kunie Ogata, Koki Nishimuko, Hiroshi Tomita, Yoshio Kimura, Michio Tanaka | 2006-01-10 |
| 6974963 | Substrate inspecting device, coating/developing device and substrate inspecting method | Michio Tanaka, Makoto Kiyota, Takashi Aiuchi | 2005-12-13 |
| 6766209 | Managing system, managing method, host computer, and information collecting/transmitting unit | Takashi Aiuchi, Makoto Kiyota, Michio Tanaka | 2004-07-20 |
| 6457882 | Substrate processing method and substrate processing apparatus | Kunie Ogata, Masanori Tateyama, Yoshiyuki Nakajima | 2002-10-01 |