Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8060244 | Substrate processing apparatus and carrier adjusting system | Akihito Suzuki, Hirotsugu Kamamoto, Shuichi Yonemura, Takashi Imafu, Kazuhisa Sakamoto | 2011-11-15 |
| 6974963 | Substrate inspecting device, coating/developing device and substrate inspecting method | Michio Tanaka, Makoto Kiyota, Ryouichi Uemura | 2005-12-13 |
| 6766209 | Managing system, managing method, host computer, and information collecting/transmitting unit | Makoto Kiyota, Ryouichi Uemura, Michio Tanaka | 2004-07-20 |
| 6394670 | Parts maintenance managing system | Kunie Ogata, Masanori Tateyama | 2002-05-28 |