Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974963 | Substrate inspecting device, coating/developing device and substrate inspecting method | Michio Tanaka, Takashi Aiuchi, Ryouichi Uemura | 2005-12-13 |
| 6766209 | Managing system, managing method, host computer, and information collecting/transmitting unit | Takashi Aiuchi, Ryouichi Uemura, Michio Tanaka | 2004-07-20 |