Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457882 | Substrate processing method and substrate processing apparatus | Ryouichi Uemura, Masanori Tateyama, Yoshiyuki Nakajima | 2002-10-01 |
| 6431769 | Substrate processing system and substrate processing method | Yuji Fukuda | 2002-08-13 |
| 6394670 | Parts maintenance managing system | Takashi Aiuchi, Masanori Tateyama | 2002-05-28 |
| 6313903 | Resist coating and developing unit | — | 2001-11-06 |
| 6281962 | Processing apparatus for coating substrate with resist and developing exposed resist including inspection equipment for inspecting substrate and processing method thereof | Koki Nishimuko | 2001-08-28 |
| 6266125 | Resist processing method and apparatus | Yuji Fukuda | 2001-07-24 |
| 6221787 | Apparatus and method of forming resist film | — | 2001-04-24 |
| 6051349 | Apparatus for coating resist and developing the coated resist | Kazutoshi Yoshioka | 2000-04-18 |
| 5968691 | Method and apparatus for coating resist and developing the coated resist | Kazutoshi Yoshioka | 1999-10-19 |
| 5939130 | Coating film forming method and coating film forming apparatus | Masatoshi Shiraishi, Yukio Kiba | 1999-08-17 |
| 5845170 | Developing method | — | 1998-12-01 |