Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381083 | Bonding apparatus and bonding method | Toshifumi Inamasu | 2025-08-05 |
| 11348791 | Bonding apparatus and bonding method | Toshifumi Inamasu | 2022-05-31 |
| 8698052 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Masahide Tadokoro, Ryoichi Uemura, Mitsuteru Yano | 2014-04-15 |
| 8253077 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Masahide Tadokoro, Tsuyoshi Shibata | 2012-08-28 |
| 8242417 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Masahide Tadokoro, Ryoichi Uemura, Mitsuteru Yano | 2012-08-14 |
| 8135487 | Temperature setting method and apparatus for a thermal processing plate | Megumi Jyousaka, Masahide Tadokoro, Yoshitaka Konishi, Kunie Ogata | 2012-03-13 |
| 8041525 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system | Yoshihiro Kondo, Kunie Ogata | 2011-10-18 |
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Masahide Tadokoro, Tsuyoshi Shibata | 2011-07-26 |
| 7968825 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Kunie Ogata | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Masahide Tadokoro, Megumi Jyousaka, Yoshitaka Konishi, Kunie Ogata | 2011-06-07 |
| 7897896 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Kunie Ogata | 2011-03-01 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Masahide Tadokoro, Kunie Ogata, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |
| 7822574 | Substrate measuring method, computer-readable recording medium recording program thereon, and substrate processing system | Kunie Ogata, Yoshihiro Kondo | 2010-10-26 |
| 7529595 | Method of controlling substrate processing apparatus and substrate processing apparatus | Shigeki Wada, Masami Yamashita | 2009-05-05 |
| 7411669 | Substrate defect inspection method, computer readable storage medium, and defect inspection apparatus | Hiroshi Tomita | 2008-08-12 |