Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381083 | Bonding apparatus and bonding method | Shinichi Shinozuka | 2025-08-05 |
| 12308294 | Bonding apparatus and bonding method | Tetsuya Maki, Tatsumi Oonishi | 2025-05-20 |
| 11804466 | Substrate processing apparatus, substrate processing method and bonding method | — | 2023-10-31 |
| 11658146 | Bonding apparatus, bonding system, bonding method, and recording medium | Takashi Nakamitsu, Shuhei Matsumoto | 2023-05-23 |
| 11545383 | Substrate positioning apparatus, substrate positioning method, and bonding apparatus | Tetsuya Maki | 2023-01-03 |
| 11348791 | Bonding apparatus and bonding method | Shinichi Shinozuka | 2022-05-31 |
| 11094667 | Bonding apparatus, bonding system, bonding method, and recording medium | Takashi Nakamitsu, Shuhei Matsumoto | 2021-08-17 |
| 10373847 | Bonding apparatus | — | 2019-08-06 |
| 10340248 | Bonding systems | Masataka Matsunaga, Takashi Koga, Takeshi Tamura, Takahiro Masunaga, Yuji Mimura +2 more | 2019-07-02 |
| 9468946 | Wiping pad, and nozzle maintenance apparatus and coating treatment apparatus using wiping pad | Yukio Ogasawara, Kei Tashiro | 2016-10-18 |
| 8307778 | Coating method and coating unit | Fumihiko Ikeda, Kenya Shinozaki, Yoshitaka Otsuka | 2012-11-13 |
| 7908995 | Stage apparatus and application processing apparatus | Tsuyoshi Yamasaki, Kazuhito Miyazaki | 2011-03-22 |
| 7905195 | Floating-type substrate conveying and processing apparatus | Tsuyoshi Yamasaki, Kenya Shinozaki, Kimio Motoda | 2011-03-15 |