Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378728 | Coating processing apparatus, coating processing method, and storage medium | — | 2022-07-05 |
| 8691481 | Local exposure method and local exposure apparatus | Hikaru Kubota, Koutarou Onoue | 2014-04-08 |
| 8307778 | Coating method and coating unit | Toshifumi Inamasu, Kenya Shinozaki, Yoshitaka Otsuka | 2012-11-13 |