FI

Fumihiko Ikeda

TL Tokyo Electron Limited: 3 patents #2,069 of 5,567Top 40%
Overall (All Time): #1,417,100 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11378728 Coating processing apparatus, coating processing method, and storage medium 2022-07-05
8691481 Local exposure method and local exposure apparatus Hikaru Kubota, Koutarou Onoue 2014-04-08
8307778 Coating method and coating unit Toshifumi Inamasu, Kenya Shinozaki, Yoshitaka Otsuka 2012-11-13