HK

Hikaru Kubota

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,099,374 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8691481 Local exposure method and local exposure apparatus Fumihiko Ikeda, Koutarou Onoue 2014-04-08