Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8346506 | Transforming metrology data from a semiconductor treatment system using multivariate analysis | Vi Vuong, Junwei Bao, Yan Chen, Sebastien Egret | 2013-01-01 |
| 7884950 | Substrate processing method, program, computer-readable storage medium, and substrate processing system | Kunie Ogata, Tsuyoshi Shibata | 2011-02-08 |
| 7639370 | Apparatus for deriving an iso-dense bias | Joerg Bischoff | 2009-12-29 |
| 7598099 | Method of controlling a fabrication process using an iso-dense bias | Joerg Bischoff | 2009-10-06 |
| 7445446 | Method for in-line monitoring and controlling in heat-treating of resist coated wafers | Kirsten Ruck | 2008-11-04 |