Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8346506 | Transforming metrology data from a semiconductor treatment system using multivariate analysis | Vi Vuong, Junwei Bao, Yan Chen, Heiko Weichert | 2013-01-01 |
| 8170833 | Transforming metrology data from a semiconductor treatment system using multivariate analysis | Vi Vuong, Junwei Bao, Yan Chen, Weichert Heiko | 2012-05-01 |
| 7467064 | Transforming metrology data from a semiconductor treatment system using multivariate analysis | Vi Vuong, Junwei Bao, Yan Chen, Weichert Heiko | 2008-12-16 |