Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Yasushi Takiguchi, Teruhiko Kodama, Yoshiki Okamoto | 2022-12-20 |
| 11059145 | Dressing apparatus and dressing method for substrate rear surface polishing member | Yoshiki Okamoto, Yasushi Takiguchi, Akihiro Kubo, Ryuto Ozasa | 2021-07-13 |
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Teruhiko Kodama, Akihiro Kubo +3 more | 2020-11-17 |