Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716002 | Substrate cleaning method | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Naoto Yoshitaka +2 more | 2017-07-25 |
| 8578953 | Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium | Yasushi Takiguchi, Taro Yamamoto, Akihiro Fujimoto, Shuuichi Nishikido, Naoto Yoshitaka +2 more | 2013-11-12 |
| 7766566 | Developing treatment apparatus and developing treatment method | Takahiro Kitano, Masami Akimoto, Shuuichi Nishikido | 2010-08-03 |