Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666463 | Substrate processing apparatus | Katsuhiro Morikawa, Akira Murata, Junya Minamida | 2017-05-30 |
| 9373531 | Substrate transfer device, substrate processing apparatus, and substrate accommodation method | Akira Murata, Katsuhiro Morikawa | 2016-06-21 |
| 8978670 | Substrate processing apparatus | Junya Minamida, Yasuhiro Chouno, Osamu Kuroda, Kazuyoshi Eshima, Masahiro Yoshida +1 more | 2015-03-17 |
| 8845262 | Substrate processing apparatus, substrate processing method and storage medium storing substrate processing program | Akira Murata, Osamu Kuroda, Kouji Kimoto, Masahiro Yoshida | 2014-09-30 |
| 8662811 | Substrate processing apparatus | Junya Minamida | 2014-03-04 |
| 8408158 | Coating/developing device and method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2013-04-02 |
| 8302556 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2012-11-06 |
| 8206076 | Substrate processing system | Yasushi Hayashida, Akira Miyata, Kensei Yamamoto, Yuichi Yamamoto, Michiaki Matsushita | 2012-06-26 |
| 7793609 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2010-09-14 |
| 7281869 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2007-10-16 |
| 7267497 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2007-09-11 |
| 7245348 | Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2007-07-17 |
| 7241061 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Nobuaki Matsuoka, Yoshio Kimura +1 more | 2007-07-10 |
| 6919913 | Processing system | Hiroichi Inada | 2005-07-19 |
| 6746197 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Mitiaki Matsushita, Kazuhiko Ito | 2004-06-08 |
| 6726771 | Treatment solution supply method and treatment solution supply unit | — | 2004-04-27 |
| 6672779 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2004-01-06 |
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2003-12-02 |
| 6656281 | Substrate processing apparatus and substrate processing method | Hiroyuki Kudou | 2003-12-02 |
| 6471422 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2002-10-29 |
| 6444029 | Multistage spin type substrate processing system | Yoshio Kimura | 2002-09-03 |
| 6439822 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Mitiaki Matsushita, Kazuhiko Ito | 2002-08-27 |
| 6432204 | Temperature and humidity controlled processing system | — | 2002-08-13 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |
| 6426303 | Processing system | — | 2002-07-30 |