Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6402401 | Substrate processing apparatus and substrate processing method | Shinichi Hayashi, Naruaki Iida, Yuji Matsuyama, Yoichi Deguchi | 2002-06-11 |
| 6402400 | Substrate processing apparatus | Takashi Takekuma, Kenji Okumura | 2002-06-11 |
| 6402508 | Heat and cooling treatment apparatus and substrate processing system | Koji Harada | 2002-06-11 |
| 6405094 | Apparatus and method of collecting substrates abnormally processed or processed previous to ordinary processing | Tadayuki Yamaguchi, Yoshitaka Hara | 2002-06-11 |
| 6399518 | Resist coating and developing processing apparatus | — | 2002-06-04 |
| 6379056 | Substrate processing apparatus | — | 2002-04-30 |
| 6341903 | Substrate processing apparatus | — | 2002-01-29 |
| 6340643 | Treatment solution supply method | — | 2002-01-22 |
| 6338582 | Substrate delivery apparatus and coating and developing processing system | — | 2002-01-15 |
| 6332724 | Substrate processing apparatus | Mitsuteru Yano, Norio Semba, Kouzou Kanagawa, Masami Akimoto, Kazuhiko Ohi | 2001-12-25 |
| 6319322 | Substrate processing apparatus | Michiaki Matsushita, Kazuhiko Ito, Tadayuki Yamaguchi | 2001-11-20 |
| 6318948 | Substrate transfer apparatus and substrate processing apparatus | Tadayuki Yamaguchi | 2001-11-20 |
| 6309116 | Substrate processing system | Koji Mahara, Hiroyuki Kudou, Hiroichi Inada | 2001-10-30 |
| 6299363 | Substrate processing apparatus | — | 2001-10-09 |
| 6293713 | Substrate processing apparatus | — | 2001-09-25 |
| 6290405 | Substrate processing apparatus | — | 2001-09-18 |
| 6264705 | Processing system | Masami Akimoto | 2001-07-24 |
| 6264381 | Process system | — | 2001-07-24 |
| 6197372 | Coating and developing apparatus, complex apparatus and processing method in coating and developing apparatus | Masami Akimoto | 2001-03-06 |
| 6161969 | Apparatus for processing a substrate | Yoshio Kimura | 2000-12-19 |
| 6126703 | Substrate processing apparatus having an interface section including two stacked substrate waiting table | Masami Akimoto | 2000-10-03 |
| 6074154 | Substrate treatment system, substrate transfer system, and substrate transfer method | Masami Akimoto, Kazuhiko Ito, Mitiaki Matsushita, Masatoshi Kaneda, Yuji Matsuyama | 2000-06-13 |
| 5826129 | Substrate processing system | Keizo Hasebe, Shinji Nagashima, Norio Semba, Masami Akimoto, Yoshio Kimura +3 more | 1998-10-20 |
| 5711646 | Substrate transfer apparatus | Masami Akimoto, Hiroyuki Kudou | 1998-01-27 |
| 4338241 | Synthetic resin composition | Hideo Ito, Yasuo Morinibu, Michitomo Takeyasu | 1982-07-06 |