Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746197 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Issei Ueda, Kazuhiko Ito | 2004-06-08 |
| 6655891 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Masatoshi Kaneda, Yuji Matsuyama | 2003-12-02 |
| 6439822 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Issei Ueda, Kazuhiko Ito | 2002-08-27 |
| 6425722 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Masatoshi Kaneda, Yuji Matsuyama | 2002-07-30 |
| 6074154 | Substrate treatment system, substrate transfer system, and substrate transfer method | Issei Ueda, Masami Akimoto, Kazuhiko Ito, Masatoshi Kaneda, Yuji Matsuyama | 2000-06-13 |
| 5685039 | Cleaning apparatus | Tomoko Hamada, Kiyohisa Tateyama, Akira Yonemizu | 1997-11-11 |