Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131896 | Light control sheets and imaging systems | Akiko Nagai, Koichi Makidai | 2021-09-28 |
| 8863373 | Apparatus and method of application and development | Nobuaki Matsuoka, Shinichi Hayashi, Yoshitaka Hara | 2014-10-21 |
| 8408158 | Coating/developing device and method | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2013-04-02 |
| 8377501 | Coating and developing system control method of controlling coating and developing system | Yoshitaka Hara, Tomohiro Kaneko | 2013-02-19 |
| 8313257 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Shinichi Hayashi | 2012-11-20 |
| 8302556 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2012-11-06 |
| 8206076 | Substrate processing system | Issei Ueda, Akira Miyata, Kensei Yamamoto, Yuichi Yamamoto, Michiaki Matsushita | 2012-06-26 |
| 8057114 | Wet-processing apparatus, wet-processing method and storage medium | Yoshitaka Hara | 2011-11-15 |
| 8025023 | Coating and developing system, coating and developing method and storage medium | Yoshitaka Hara | 2011-09-27 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Nobuaki Matsuoka, Shinichi Hayashi | 2011-06-07 |
| 7880859 | Substrate processing system and substrate processing method | Shinichi Hayashi, Yoshitaka Hara | 2011-02-01 |
| 7871211 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2011-01-18 |
| 7841072 | Apparatus and method of application and development | Nobuaki Matsuoka, Shinichi Hayashi, Yoshitaka Hara | 2010-11-30 |
| 7793609 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2010-09-14 |
| 7789577 | Coating and developing system, coating and developing method and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2010-09-07 |
| 7729798 | Substrate processing system, and method of control therefor, control program, and storage medium | Yoshitaka Hara | 2010-06-01 |
| 7678417 | Coating method and coating apparatus | Yoshitaka Hara | 2010-03-16 |
| 7645713 | Substrate processing system and substrate processing method | Shinichi Hayashi, Yoshitaka Hara | 2010-01-12 |
| 7597492 | Coating and developing system, coating and developing method and storage medium | Yoshitaka Hara | 2009-10-06 |
| 7591601 | Coater/developer, coating/developing method, and storage medium | Nobuaki Matsuoka, Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi | 2009-09-22 |
| 7474377 | Coating and developing system | Nobuaki Matsuoka, Shinichi Hayashi | 2009-01-06 |
| 7403260 | Coating and developing system | Nobuaki Matsuoka, Shinichi Hayashi | 2008-07-22 |
| 7322756 | Coating and developing apparatus and coating and developing method | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka | 2008-01-29 |
| 7281869 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-10-16 |