Issued Patents All Time
Showing 1–25 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Katsunori Ichino, Tsunenaga Nakashima, Hideo Funakoshi, Masayuki Kajiwara | 2020-10-20 |
| 10767200 | Method for producing L-amino acid | Kisho Suzuki, Masayuki Mori, Takehiro Hiura, Takehiko Chikamori | 2020-09-08 |
| 9460947 | Coating and developing apparatus and method, and storage medium | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2016-10-04 |
| 9417529 | Coating and developing apparatus and method | Akira Miyata, Shinichi Hayashi, Suguru Enokida, Hiroshi Tomita, Makoto Hayakawa +1 more | 2016-08-16 |
| 8985880 | Coating and developing apparatus and method | Akira Miyata, Shinichi Hayashi, Suguru Enokida, Hiroshi Tomita, Makoto Hayakawa +1 more | 2015-03-24 |
| 8888387 | Coating and developing apparatus and method | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2014-11-18 |
| 8863373 | Apparatus and method of application and development | Shinichi Hayashi, Yasushi Hayashida, Yoshitaka Hara | 2014-10-21 |
| 8817225 | Coating and developing apparatus and method, and storage medium | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2014-08-26 |
| 8740481 | Coating and developing apparatus | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2014-06-03 |
| 8568043 | Coating and developing apparatus and coating and developing method | — | 2013-10-29 |
| 8534936 | Coating and developing apparatus | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2013-09-17 |
| 8506186 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Kousuke Yoshihara +1 more | 2013-08-13 |
| 8480319 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Shinichi Hayashi, Yuichi Douki, Akira Miyata, Yuuichi Yamamoto, Kousuke Yoshihara +1 more | 2013-07-09 |
| 8419299 | Coating and developing apparatus and method, and storage medium | Akira Miyata, Shinichi Hayashi, Suguru Enokida | 2013-04-16 |
| 8408158 | Coating/developing device and method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2013-04-02 |
| 8342761 | Coating/developing apparatus and coating/developing method | — | 2013-01-01 |
| 8313257 | Coating and developing apparatus, substrate processing method, and storage medium | Yasushi Hayashida, Shinichi Hayashi | 2012-11-20 |
| 8302556 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2012-11-06 |
| 8268384 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Akira Miyata | 2012-09-18 |
| 8038769 | Liquid processing apparatus, liquid processing method and storage medium | — | 2011-10-18 |
| 8025925 | Heating apparatus, coating and development apparatus, and heating method | Tetsuo Fukuoka, Takahiro Kitano | 2011-09-27 |
| 7997813 | Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2011-08-16 |
| 7955011 | Coating and developing apparatus, substrate processing method, and storage medium | Yasushi Hayashida, Shinichi Hayashi | 2011-06-07 |
| 7952627 | Solid-state image capturing apparatus and electric information device | Hidenori Morimoto | 2011-05-31 |
| 7914613 | Liquid processing apparatus, liquid processing method and storage medium | — | 2011-03-29 |