Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Katsunori Ichino, Tsunenaga Nakashima, Nobuaki Matsuoka, Masayuki Kajiwara | 2020-10-20 |
| 9649577 | Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording medium | Tomohiro Iseki, Seiya Totsuka | 2017-05-16 |
| 8707893 | Substrate treatment system, substrate treatment method, and non-transitory computer storage medium | Masatoshi Deguchi, Toshichika Takei, Norifumi Sato, Wataru Kiyota, Daisuke Ishimaru +3 more | 2014-04-29 |
| 7819594 | Development processing device | Masahito Hamada, Yoshiki Okamoto | 2010-10-26 |
| 7714979 | Substrate processing apparatus | Taro Yamamoto, Yuichiro Inatomi | 2010-05-11 |
| 7600933 | Substrate processing apparatus | Taro Yamamoto, Yuichiro Inatomi | 2009-10-13 |