Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404587 | Substrate processing apparatus and substrate processing method | Yusaku Hashimoto, Takafumi Niwa | 2025-09-02 |
| 12281390 | Substrate liquid processing apparatus for supplying temperature-controlled plating liquid | Tomonori Esaki | 2025-04-22 |
| 11795546 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Takashi Tanaka, Keiichi Fujita | 2023-10-24 |
| 11519074 | Plating method and recording medium | Kazutoshi Iwai, Nobutaka Mizutani, Takashi Tanaka | 2022-12-06 |
| 11230767 | Plating method, plating apparatus and recording medium | Takashi Tanaka, Kazutoshi Iwai | 2022-01-25 |
| 11028483 | Plating method, plating apparatus and recording medium | Takashi Tanaka, Kazutoshi Iwai | 2021-06-08 |
| 11004684 | Forming method of hard mask | Mitsuaki Iwashita, Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda +1 more | 2021-05-11 |
| 10784111 | Plating method, plating apparatus and recording medium | Takashi Tanaka, Kazutoshi Iwai | 2020-09-22 |
| 10731256 | Plating apparatus, plating method, and recording medium | Kazutoshi Iwai, Nobutaka Mizutani, Takashi Tanaka | 2020-08-04 |
| 10354915 | Adhesion layer forming method, adhesion layer forming system and recording medium | Tomohisa Hoshino, Masato Hamada, Takashi Tanaka, Yusuke Saito | 2019-07-16 |
| 10224202 | Forming method of hard mask, forming apparatus of hard mask and recording medium | Mitsuaki Iwashita, Takeshi Nagao, Nobutaka Mizutani, Takashi Tanaka, Koichi Yatsuda +1 more | 2019-03-05 |
| 10179950 | Plating method, plated component, and plating system | Takashi Tanaka, Nobutaka Mizutani | 2019-01-15 |
| 10030308 | Plating method, plating system and storage medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito, Mitsuaki Iwashita | 2018-07-24 |
| 9966306 | Catalyst layer forming method, catalyst layer forming system and recording medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito, Kazutoshi Iwai, Mitsuaki Iwashita | 2018-05-08 |
| 9922835 | Plating method, plating apparatus, and storage medium | Takashi Tanaka | 2018-03-20 |
| 9847239 | Substrate processing apparatus | — | 2017-12-19 |
| 9837308 | Plating method, plating system and storage medium | Nobutaka Mizutani, Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita | 2017-12-05 |
| 9777379 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Mitsuaki Iwashita | 2017-10-03 |
| 9761485 | Catalyst layer forming method, catalyst layer forming system, and recording medium | Takashi Tanaka | 2017-09-12 |
| 9552994 | Plating apparatus, plating method, and storage medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito, Mitsuaki Iwashita | 2017-01-24 |
| 9523153 | Pre-treatment method for plating and storage medium | Takashi Tanaka, Kazutoshi Iwai, Mitsuaki Iwashita | 2016-12-20 |
| 9505019 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Mitsuaki Iwashita | 2016-11-29 |
| 9487865 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Mitsuaki Iwashita | 2016-11-08 |
| 9016231 | Substrate processing method and substrate processing system | — | 2015-04-28 |
| 8848161 | Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method | — | 2014-09-30 |