Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8728247 | Substrate processing method, storage medium storing program for executing substrate processing method and substrate processing apparatus | — | 2014-05-20 |
| 8691497 | Developing treatment method | Mitsuaki Iwashita | 2014-04-08 |
| 8646403 | Method for improving surface roughness of processed film of substrate and apparatus for processing substrate | — | 2014-02-11 |
| 8563230 | Substrate processing method and substrate processing system | — | 2013-10-22 |
| 8420304 | Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method | — | 2013-04-16 |
| 8411246 | Resist coating and developing apparatus and method | — | 2013-04-02 |
| 8343714 | Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit | Gousuke Shiraishi | 2013-01-01 |
| 7989156 | Substrate treatment method and substrate treatment apparatus | — | 2011-08-02 |
| 7875420 | Method for improving surface roughness of processed film of substrate and apparatus for processing substrate | — | 2011-01-25 |
| 7819076 | Substrate treatment method and substrate treatment apparatus | — | 2010-10-26 |
| 7714979 | Substrate processing apparatus | Taro Yamamoto, Hideo Funakoshi | 2010-05-11 |
| 7600933 | Substrate processing apparatus | Taro Yamamoto, Hideo Funakoshi | 2009-10-13 |