Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10527948 | Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium | Seiji Nagahara, Masaru Tomono, Nobutaka Fukunaga | 2020-01-07 |
| 10459339 | Resist pattern forming method, coating and developing apparatus and storage medium | Tetsuo Fukuoka, Yoshio Kimura | 2019-10-29 |
| 10274843 | Exposure apparatus, exposure method and storage medium | Seiji Nagahara, Masaru Tomono, Nobutaka Fukunaga, Yukie Minekawa | 2019-04-30 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-10-16 |
| 10025190 | Substrate treatment system | Seiji Nagahara, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI, Masaru Tomono +2 more | 2018-07-17 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Yuichi Terashita, Tomohiro Iseki, Masaru Tomono, Hironori Mizoguchi | 2018-02-20 |
| 8614140 | Semiconductor device manufacturing apparatus | Ryuichi Asako, Shigeru Tahara | 2013-12-24 |
| 8343714 | Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit | Yuichiro Inatomi | 2013-01-01 |
| 8101507 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Ryuichi Asako, Shigeru Tahara | 2012-01-24 |