Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yuichi Yoshida, Kousuke Yoshihara, Yuichi Terashita, Toshinobu Furusho +1 more | 2020-08-04 |
| 10274843 | Exposure apparatus, exposure method and storage medium | Seiji Nagahara, Masaru Tomono, Nobutaka Fukunaga, Gousuke Shiraishi | 2019-04-30 |