Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094737 | Substrate processing apparatus, control method, and computer-readable storage medium | Katsunori Ichino, Daisuke Ishimaru, Takuya Tajiri, Atsushi Yamamoto, Masato Imamura +5 more | 2024-09-17 |
| 10807027 | Treatment solution supply apparatus and substrate treatment system | Katsunori Ichino, Tsunenaga Nakashima, Hideo Funakoshi, Nobuaki Matsuoka | 2020-10-20 |
| 10023477 | Treatment solution supply method, treatment solution supply apparatus, and non-transitory computer-readable recording medium | Masato Hayashi, Toyohisa Tsuruda | 2018-07-17 |
| 9246009 | Semiconductor device and method for manufacturing the same | Yoshiaki Oikawa, Masataka Nakada, Masami JINTYOU, Shunpei Yamazaki | 2016-01-26 |
| 9006051 | Semiconductor device and method for manufacturing the same | Yoshiaki Oikawa, Masataka Nakada, Masami JINTYOU, Shunpei Yamazaki | 2015-04-14 |
| 7821005 | Method of manufacturing semiconductor device and semiconductor device | Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka | 2010-10-26 |
| 7709894 | Semiconductor device including a transistor with a gate electrode having a taper portion | Ritsuko Nagao | 2010-05-04 |
| 7605029 | Method of manufacturing semiconductor device | Osamu Nakamura, Shunpei Yamazaki, Koji Dairiki, Junichi Koezuka, Satoshi Murakami | 2009-10-20 |
| 7538011 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Osama Nakamura, Junichi Koezuka, Koji Dairiki, Toru Mitsuki +4 more | 2009-05-26 |
| 7534670 | Semiconductor device and manufacturing method of the same | Osamu Nakamura, Shunpei Yamazaki, Hideto Ohnuma | 2009-05-19 |
| 7501671 | Semiconductor device and method of manufacturing the same | Takashi Hamada, Satoshi Murakami, Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka +1 more | 2009-03-10 |
| 7316947 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka, Koji Dairiki, Toru Mitsuki +4 more | 2008-01-08 |
| 7306982 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka, Koji Dairiki, Toru Mitsuki +4 more | 2007-12-11 |
| 7198992 | Method of manufacturing a semiconductor device comprising doping steps using gate electrodes and resists as masks | Takashi Hamada, Satoshi Murakami, Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka +1 more | 2007-04-03 |
| 7151016 | Method of manufacturing a semiconductor device that includes a hydrogen concentration depth profile | Ritsuko Nagao | 2006-12-19 |
| 7141822 | Semiconductor device and method for manufacturing the same | Osamu Nakamura, Junichi Koezuka, Shunpei Yamazaki, Hideaki Kuwabara | 2006-11-28 |
| 7115453 | Semiconductor device and manufacturing method of the same | Osamu Nakamura, Shunpei Yamazaki, Hideto Ohnuma | 2006-10-03 |
| 7045444 | Method of manufacturing semiconductor device that includes selectively adding a noble gas element | Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka | 2006-05-16 |
| 7033871 | Method of manufacturing semiconductor device | Osamu Nakamura, Shunpei Yamazaki, Koji Dairiki, Junichi Koezuka, Satoshi Murakami | 2006-04-25 |
| 6913956 | Semiconductor device and method of manufacturing the same | Takashi Hamada, Satoshi Murakami, Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka +1 more | 2005-07-05 |
| 6858480 | Method of manufacturing semiconductor device | Osamu Nakamura, Shunpei Yamazaki, Koji Dairiki, Junichi Koezuka, Satoshi Murakami | 2005-02-22 |
| 6808968 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Osamu Nakamura, Junichi Koezuka, Koji Dairiki, Toru Mitsuki +4 more | 2004-10-26 |