Issued Patents All Time
Showing 26–50 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871211 | Coating and developing system, coating and developing method and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2011-01-18 |
| 7841072 | Apparatus and method of application and development | Shinichi Hayashi, Yasushi Hayashida, Yoshitaka Hara | 2010-11-30 |
| 7828488 | Developing apparatus, developing method, coating and developing system and storage medium | — | 2010-11-09 |
| 7819080 | Substrate processing apparatus and substrate processing method | Yoshio Kimura, Akira Miyata | 2010-10-26 |
| 7793609 | Coating and developing apparatus | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2010-09-14 |
| 7789577 | Coating and developing system, coating and developing method and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2010-09-07 |
| 7736498 | Solution treatment apparatus and solution treatment method | Tsunenaga Nakashima, Shinichi Hayashi, Akira Oozono | 2010-06-15 |
| 7661894 | Coating and developing apparatus, and coating and developing method | Mitsuhiro Tanoue, Shinji Okada | 2010-02-16 |
| 7640885 | Liquid processing method and liquid processing apparatus | Tsunenaga Nakashima, Kenji Urata, Shinji Okada | 2010-01-05 |
| 7591601 | Coater/developer, coating/developing method, and storage medium | Takahiro Hashimoto, Katsuhiro Tsuchiya, Shinichi Hayashi, Yasushi Hayashida | 2009-09-22 |
| 7547614 | Solution treatment apparatus and solution treatment method | Tsunenaga Nakashima, Shinichi Hayashi, Akira Oozono | 2009-06-16 |
| 7527497 | Heat treating apparatus, heat treating method, and storage medium | — | 2009-05-05 |
| 7474377 | Coating and developing system | Shinichi Hayashi, Yasushi Hayashida | 2009-01-06 |
| 7403260 | Coating and developing system | Shinichi Hayashi, Yasushi Hayashida | 2008-07-22 |
| 7322756 | Coating and developing apparatus and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida | 2008-01-29 |
| 7287920 | Semiconductor manufacturing apparatus and method | Shinichi Hayashi, Tsunenaga Nakashima, Suguru Enokida, Masami Akimoto | 2007-10-30 |
| 7281869 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2007-10-16 |
| 7267497 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2007-09-11 |
| 7245348 | Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2007-07-17 |
| 7241061 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Yasushi Hayashida, Yoshio Kimura, Issei Ueda +1 more | 2007-07-10 |
| 7224618 | Nonvolatile semiconductor memory device with erase voltage measurement | — | 2007-05-29 |
| 7139202 | Semiconductor storage device, mobile electronic apparatus, and method for controlling the semiconductor storage device | Masaru Nawaki, Yoshinao Morikawa, Hiroshi Iwata, Akihide Shibata | 2006-11-21 |
| 7072236 | Semiconductor memory device with pre-sense circuits and a differential sense amplifier | — | 2006-07-04 |
| 7050331 | Semiconductor memory device and portable electronic apparatus | Masaru Nawaki, Yoshinao Morikawa, Hiroshi Iwata, Akihide Shibata | 2006-05-23 |
| 7006371 | Semiconductor memory device and method for programming and erasing a memory cell | — | 2006-02-28 |