Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7836845 | Substrate carrying and processing apparatus | Suguru Enokida | 2010-11-23 |
| 7661894 | Coating and developing apparatus, and coating and developing method | Nobuaki Matsuoka, Shinji Okada | 2010-02-16 |
| 6815647 | Heat treatment unit and heat treatment method | Tetsuya Oda | 2004-11-09 |
| 6551448 | Heat processing apparatus of substrate | Yasuhiro Kuga, Kouichirou Tanaka | 2003-04-22 |
| 6534750 | Heat treatment unit and heat treatment method | Tetsuya Oda | 2003-03-18 |
| 6474986 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Toshichika Takei, Eiichi Shirakawa | 2002-11-05 |
| 6450805 | Hot plate cooling method and heat processing apparatus | Tetsuya Oda, Toshichika Takei | 2002-09-17 |
| 6185370 | Heating apparatus for heating an object to be processed | Eiichi Sekimoto | 2001-02-06 |