Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798821 | Substrate processing apparatus, substrate processing method, and storage medium | Yukinobu OTSUKA, Shinsuke TAKAKI, Koji Ushimaru, Ryohei FUJISE | 2023-10-24 |
| 11393702 | Heat treatment apparatus and heat treatment method | Shinsuke TAKAKI, Yukinobu OTSUKA, Shinichi SAGARA | 2022-07-19 |
| 8776393 | Substrate cooling apparatus, substrate cooling method, and storage medium | Kouichi Mizunaga, Masatoshi Kaneda | 2014-07-15 |
| 6551448 | Heat processing apparatus of substrate | Mitsuhiro Tanoue, Kouichirou Tanaka | 2003-04-22 |