RF

Ryohei FUJISE

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,616,089 of 4,157,543Top 65%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11798821 Substrate processing apparatus, substrate processing method, and storage medium Yukinobu OTSUKA, Shinsuke TAKAKI, Yasuhiro Kuga, Koji Ushimaru 2023-10-24