Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798821 | Substrate processing apparatus, substrate processing method, and storage medium | Yukinobu OTSUKA, Shinsuke TAKAKI, Yasuhiro Kuga, Ryohei FUJISE | 2023-10-24 |
| 11049758 | Substrate placing apparatus and substrate placing method | Masashi Itonaga | 2021-06-29 |