Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049758 | Substrate placing apparatus and substrate placing method | Koji Ushimaru | 2021-06-29 |
| 10340140 | Substrate processing apparatus and substrate processing method | Tetsuo Fukuoka | 2019-07-02 |
| 10141209 | Processing gas generating apparatus, processing gas generating method, substrate processing method, and storage medium | Masanobu Watanabe | 2018-11-27 |