Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798821 | Substrate processing apparatus, substrate processing method, and storage medium | Shinsuke TAKAKI, Yasuhiro Kuga, Koji Ushimaru, Ryohei FUJISE | 2023-10-24 |
| 11393702 | Heat treatment apparatus and heat treatment method | Shinsuke TAKAKI, Yasuhiro Kuga, Shinichi SAGARA | 2022-07-19 |
| 11049738 | Substrate heating device | Hibiki Otani | 2021-06-29 |