Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7267497 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-09-11 |
| 7262829 | Coating and developing apparatus and coating and developing method | Yoshitaka Hara | 2007-08-28 |
| 7245348 | Coating and developing system and coating and developing method with antireflection film and an auxiliary block for inspection and cleaning | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-07-17 |
| 7241061 | Coating and developing system and coating and developing method | Masami Akimoto, Shinichi Hayashi, Nobuaki Matsuoka, Yoshio Kimura, Issei Ueda +1 more | 2007-07-10 |
| 5724857 | Steering gear apparatus of rack-and-pinion type | Yoshisada Wada, Takahiro Iwase, Kunio Hayashi, Kazuhiko Tsuda, Shigemi Shioya | 1998-03-10 |
| 5596904 | Steering gear apparatus of rack-and-pinion type | Yoshisada Wada, Takahiro Iwase, Kunio Hayashi, Kazuhiko Tsuda, Shigemi Shioya | 1997-01-28 |
| 5028955 | Exposure apparatus | Noriyuki Anai, Osamu Hirakawa, Masami Akimoto, Yasuhiro Sakamoto, Keisuke Shigaki +1 more | 1991-07-02 |