Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8978670 | Substrate processing apparatus | Junya Minamida, Issei Ueda, Osamu Kuroda, Kazuyoshi Eshima, Masahiro Yoshida +1 more | 2015-03-17 |
| 7445689 | Substrate processing method and substrate processing system | Masahiro Yoshida | 2008-11-04 |
| 7180035 | Substrate processing device | Norihiro Ito, Hiroaki Kawaguchi | 2007-02-20 |
| 7086410 | Substrate processing apparatus and substrate processing method | Norihiro Ito, Keigo Satake, Tadashi Iino | 2006-08-08 |
| 6186171 | Pneumatically driven liquid supply apparatus | Hiroshi Tanaka, Takashi Terada, Satoshi Nakashima | 2001-02-13 |
| 5503171 | Substrates-washing apparatus | Kenji Yokomizo, Chihaya Tashima, Eiichi Mukai, Yoshiyuki Honda, Naohiko Hamamura +1 more | 1996-04-02 |