Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Yosuke Kawabuchi, Kouzou Tachibana, Mitsunori Nakamori, Keisuke Egashira, Koji Tanaka +6 more | 2020-12-15 |
| 9922849 | Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof | Yasuyuki Ido, Naoki Shindo, Takehiko Orii, Keisuke Egashira, Yosuke Hachiya +2 more | 2018-03-20 |
| 9378940 | Substrate processing apparatus and substrate processing method | Hisashi Kawano, Norihiro Ito, Yosuke Hachiya, Jun Nogami, Itaru Kanno | 2016-06-28 |
| 8343284 | Film removing device and film removing method | Shigenori Kamei, Masahito Hamada | 2013-01-01 |
| 8016976 | Film removing device and film removing method | Shigenori Kamei, Masahito Hamada | 2011-09-13 |