Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854815 | Substrate drying apparatus, substrate drying method and storage medium | — | 2023-12-26 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Hiroshi Marumoto +3 more | 2021-03-16 |
| 10867814 | Liquid processing method, substrate processing apparatus, and storage medium | Kouzou Tachibana, Mitsunori Nakamori, Kotaro Ooishi, Keisuke Egashira, Koji Tanaka +6 more | 2020-12-15 |
| 10727042 | Liquid processing method, substrate processing apparatus and recording medium | Mitsunori Nakamori, Takuro Masuzumi, Koji Yamashita, Shozou Maeda | 2020-07-28 |
| 10692739 | Substrate processing apparatus | Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Shotaro Kitayama, Hiroshi Marumoto +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Hiromi Kiyose, Takuro Masuzumi, Hiroki Ohno +3 more | 2019-08-27 |
| 10192758 | Substrate processing apparatus | Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2019-01-29 |
| 9805957 | Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program | Hisashi Kawano, Satoru Tanaka, Hiroyuki Suzuki, Kotaro Oishi, Kazuyoshi Shinohara +1 more | 2017-10-31 |
| 9362106 | Substrate processing method, substrate processing apparatus, and storage medium | Hayato Iwamoto, Yoshiya Hagimoto, Tomoki Tetsuka, Shinichiro Shimomura, Teruomi Minami +3 more | 2016-06-07 |
| 9321085 | Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus | Teruomi Minami, Satoru Tanaka, Tatsuya Nagamatsu, Hiroyuki Suzuki, Tsukasa Hirayama +1 more | 2016-04-26 |
| 8906165 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Teruomi Minami, Naoyuki Okamura, Hirotaka Maruyama | 2014-12-09 |
| 8545640 | Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus | Teruomi Minami, Naoyuki Okamura | 2013-10-01 |
| 8475668 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein | Hiroshi Tanaka, Teruomi Minami, Norihiro Ito, Fumihiro Kamimura, Takashi Yabuta +4 more | 2013-07-02 |