Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12226796 | Bath systems and methods thereof | Michael A. Carcasi, Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Joshua Hooge | 2025-02-18 |
| 11862483 | Substrate processing method and substrate processing apparatus | — | 2024-01-02 |
| 11738363 | Bath systems and methods thereof | Michael A. Carcasi, Ihsan Simms, Joel Estrella, Antonio Luis Pacheco Rotondaro, Joshua Hooge | 2023-08-29 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi +3 more | 2021-03-16 |
| 10844332 | Aqueous cleaning solution and method of protecting features on a substrate during etch residue removal | Takayuki Toshima, Yoshinori Nishiwaki, Trace Hurd | 2020-11-24 |
| 10847387 | Substrate processing apparatus, substrate processing method and recording medium | — | 2020-11-24 |
| 10707098 | Substrate processing apparatus, substrate processing method and memory medium | — | 2020-07-07 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Takuro Masuzumi +2 more | 2020-06-23 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Gentaro Goshi, Kento Tsukano | 2020-03-03 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi +3 more | 2019-08-27 |
| 9953840 | Substrate processing method and substrate processing system | Hisashi Kawano, Hiromi Kiyose, Mitsunori Nakamori, Kazuyuki Mitsuoka | 2018-04-24 |
| 9576829 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Koji Takayanagi, Kenji Adachi | 2017-02-21 |
| 9508574 | Process liquid supply apparatus operating method, process liquid supply apparatus and non-transitory storage medium | Koji Takayanagi, Kenji Adachi | 2016-11-29 |