Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133176 | Substrate processing method, recording medium and substrate processing system | Gentaro Goshi, Takuro Masuzumi, Hiromi Kiyose, Shogo Fukui | 2021-09-28 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Gentaro Goshi, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi +3 more | 2021-03-16 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Gentaro Goshi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto +2 more | 2020-06-23 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Gentaro Goshi, Hiroshi Marumoto | 2020-03-03 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Gentaro Goshi, Yosuke Kawabuchi, Shotaro Kitayama +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Gentaro Goshi, Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi +3 more | 2019-08-27 |