Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374565 | Substrate drying method and substrate drying apparatus | — | 2025-07-29 |
| 12142474 | Substrate processing method and substrate processing system | — | 2024-11-12 |
| 11862486 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2024-01-02 |
| 11594427 | Substrate processing apparatus and substrate processing method | Toru Ihara, Masami Yamashita | 2023-02-28 |
| 11557492 | Substrate processing apparatus and control method thereof | Satoshi Biwa, Satoshi Okamura | 2023-01-17 |
| 11446588 | Substrate processing apparatus and substrate processing method | — | 2022-09-20 |
| 11344931 | Method of removing particles of substrate processing apparatus, and substrate processing apparatus | Shogo Fukui | 2022-05-31 |
| 11201050 | Substrate processing method, recording medium and substrate processing apparatus | Itaru Kanno, Hiromi Kiyose, Naohiko Hamamura, Takuro Masuzumi, Kenji Sekiguchi +2 more | 2021-12-14 |
| 11133176 | Substrate processing method, recording medium and substrate processing system | Kento Tsukano, Takuro Masuzumi, Hiromi Kiyose, Shogo Fukui | 2021-09-28 |
| 10998186 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira | 2021-05-04 |
| 10950465 | Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus | Shotaro Kitayama, Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi, Hiroshi Marumoto +3 more | 2021-03-16 |
| 10770316 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Kazuki Kosai, Yoshihiro Kai, Hiroshi Komiya, Seiya Fujimoto, Takahisa Otsuka | 2020-09-08 |
| 10692739 | Substrate processing apparatus | Yosuke Kawabuchi, Keisuke Egashira, Hiroki Ohno, Hiroshi Marumoto, Takuro Masuzumi +2 more | 2020-06-23 |
| 10619922 | Substrate processing apparatus, substrate processing method, and storage medium | Hiromi Kiyose, Satoshi Biwa | 2020-04-14 |
| 10576493 | Substrate processing apparatus and substrate processing method | Keisuke Egashira, Hiroshi Marumoto, Kento Tsukano | 2020-03-03 |
| 10566182 | Substrate processing apparatus, substrate processing method, and storage medium | Keisuke Egashira | 2020-02-18 |
| 10504718 | Substrate processing apparatus, substrate processing method, and storage medium | Hiroki Ohno, Keisuke Egashira, Yosuke Kawabuchi, Shotaro Kitayama, Hiroshi Marumoto +3 more | 2019-12-10 |
| 10395950 | Substrate processing apparatus, substrate processing method, and recording medium | Keisuke Egashira, Yosuke Kawabuchi, Hiromi Kiyose, Takuro Masuzumi, Hiroki Ohno +3 more | 2019-08-27 |
| 10062586 | Chemical fluid processing apparatus and chemical fluid processing method | Derek Bassett, Wallace P. Printz, Hisashi Kawano, Yoshihiro Kai | 2018-08-28 |
| 10046370 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2018-08-14 |
| 9865483 | Substrate liquid processing method, substrate liquid processing apparatus, and recording medium | Hiroyuki Higashi, Takahisa Otsuka | 2018-01-09 |
| 9662685 | Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium | Kazuyuki Mitsuoka, Gen You, Hiroki Ohno, Takehiko Orii, Takayuki Toshima | 2017-05-30 |
| 7491036 | Method and system for cooling a pump | Wayne Parent | 2009-02-17 |
| 7211145 | Substrate processing apparatus and substrate processing method | — | 2007-05-01 |
| 7186093 | Method and apparatus for cooling motor bearings of a high pressure pump | — | 2007-03-06 |