Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518480 | Developing treatment method, program, computer storage medium and developing treatment system | Norifumi Sato, Yukio Kiba, Kazuhisa Hasebe | 2013-08-27 |
| 8277884 | Coating and processing apparatus and method | Shinji Kobayashi, Masahito Hamada, Masatoshi Kaneda | 2012-10-02 |
| 7927657 | Liquid processing apparatus and liquid processing method | Shinji Kobayashi, Masahito Hamada | 2011-04-19 |
| 7615117 | Coating and processing apparatus and method | Shinji Kobayashi, Masahito Hamada, Masatoshi Kaneda | 2009-11-10 |
| 7566365 | Liquid processing apparatus and liquid processing method | Shinji Kobayashi, Masahito Hamada | 2009-07-28 |