Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7401988 | Substrate processing apparatus and substrate processing method | Takayuki Katano, Hidefumi Matsui, Junichi Kitano, Masami Yamashita, Toru Aoyama +2 more | 2008-07-22 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Takayuki Katano, Hidefumi Matsui +7 more | 2007-04-24 |
| 6485203 | Substrate processing method and substrate processing apparatus | Takayuki Katano, Hidefumi Matsui, Junichi Kitano, Masami Yamashita, Toru Aoyama +2 more | 2002-11-26 |