Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7191785 | Substrate processing apparatus for resist film removal | Takayuki Toshima, Kinya Ueno, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2007-03-20 |
| 6613692 | Substrate processing method and apparatus | Takayuki Toshima, Kinya Ueno, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2003-09-02 |
| 6592678 | Cleaning method and cleaning equipment | Yuji Kamikawa, Naoki Shindo, Shigenori Kitahara | 2003-07-15 |
| 6158447 | Cleaning method and cleaning equipment | Yuji Kamikawa, Naoki Shindo, Shigenori Kitahara | 2000-12-12 |
| 6109278 | Liquid treatment method and apparatus | Naoki Shindo, Yuji Kamikawa | 2000-08-29 |
| 6096233 | Method for wet etching of thin film | Hiroki Taniyama, Hiroyuki Kudou, Akira Yonemizu | 2000-08-01 |
| 5997653 | Method for washing and drying substrates | — | 1999-12-07 |
| 5922138 | Liquid treatment method and apparatus | Naoki Shindo, Yuji Kamikawa | 1999-07-13 |