Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7191785 | Substrate processing apparatus for resist film removal | Takayuki Toshima, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2007-03-20 |
| 6746543 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2004-06-08 |
| 6613692 | Substrate processing method and apparatus | Takayuki Toshima, Miyako Yamasaka, Hideyuki Tsutsumi, Tadashi Iino, Yuji Kamikawa | 2003-09-02 |
| 6554010 | Substrate cleaning tool, having permeable cleaning head | Keizo Hirose, Kenji Sekiguchi, Tomohide Inoue, Takanori Miyazaki | 2003-04-29 |
| 6491045 | Apparatus for and method of cleaning object to be processed | Yuji Kamikawa, Satoshi Nakashima | 2002-12-10 |
| 6413355 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2002-07-02 |
| 6394110 | Substrate processing apparatus and substrate processing method | Yuji Kamikawa, Shigenori Kitahara | 2002-05-28 |
| 6342104 | Method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2002-01-29 |
| 6319329 | Method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2001-11-20 |
| 6299696 | Substrate processing apparatus and substrate processing method | Yuji Kamikawa, Shigenori Kitahara | 2001-10-09 |
| 6131588 | Apparatus for and method of cleaning object to be processed | Yuji Kamikawa, Satoshi Nakashima | 2000-10-17 |
| 6050275 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2000-04-18 |
| 6045624 | Apparatus for and method of cleaning objects to be processed | Yuji Kamikawa, Satoshi Nakashima | 2000-04-04 |
| 6001191 | Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus | Yuuji Kamikawa, Naoki Shindo, Yoshio Kumagai | 1999-12-14 |
| 5940985 | Apparatus and method for drying substrates | Yuji Kamikawa | 1999-08-24 |
| 5882433 | Spin cleaning method | — | 1999-03-16 |
| 5421905 | Method for washing wafers | Hiroki Taniyama | 1995-06-06 |
| 5261431 | Washing apparatus | Hiroki Taniyama | 1993-11-16 |
| 5236515 | Cleaning device | Yoshio Kumagai | 1993-08-17 |