Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960069 | Joining device and joining system | Shintaro Sugihara, Naoto Yoshitaka, Shigenori Kitahara | 2018-05-01 |
| 8080126 | Plasma processing apparatus | Akira Koshiishi | 2011-12-20 |
| 7537672 | Apparatus for plasma processing | Akira Koshiishi | 2009-05-26 |
| 7364626 | Substrate processing apparatus and substrate processing method | Kenji Sekiguchi | 2008-04-29 |
| 7176142 | Method of manufacturing trench structure for device | Nobutaka Mizutani, Isao Fitrianto, Isao Tsukagoshi, Satohiko Hoshino | 2007-02-13 |
| 7010826 | Substrate cleaning tool and substrate cleaning apparatus | Kenji Sekiguchi | 2006-03-14 |
| 6554010 | Substrate cleaning tool, having permeable cleaning head | Kenji Sekiguchi, Tomohide Inoue, Takanori Miyazaki, Kinya Ueno | 2003-04-29 |
| 6544380 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2003-04-08 |
| 6431258 | Process solution supplying apparatus | Nobuo Konishi | 2002-08-13 |
| 6432212 | Substrate washing method | Kenji Sekiguchi | 2002-08-13 |
| 6391147 | Plasma treatment method and apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito, Kazuya Nagaseki | 2002-05-21 |
| 6385805 | Scrubbing apparatus | Nobuo Konishi, Kenji Sekiguchi | 2002-05-14 |
| 6300043 | Method of forming resist film | Nobuo Konishi | 2001-10-09 |
| 6264788 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2001-07-24 |
| 6175983 | Substrate washing apparatus and method | Kenji Sekiguchi | 2001-01-23 |
| 6165270 | Process solution supplying apparatus | Nobuo Konishi | 2000-12-26 |
| 6106737 | Plasma treatment method utilizing an amplitude-modulated high frequency power | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2000-08-22 |
| 6074518 | Plasma processing apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Hiroshi Tsuchiya, Masayuki Tomoyasu +6 more | 2000-06-13 |
| 6012858 | Apparatus and method for forming liquid film | Nobuo Konishi | 2000-01-11 |
| 5919332 | Plasma processing apparatus | Akira Koshiishi, Masahiro Ogasawara, Kazuya Nagaseki, Riki Tomoyoshi, Makoto Aoki | 1999-07-06 |
| 5698062 | Plasma treatment apparatus and method | Takao Sakamoto, Kazuhiro Tahara, Kenji Momose, Kosuke Imafuku, Shosuke Endo +2 more | 1997-12-16 |