Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5919332 | Plasma processing apparatus | Akira Koshiishi, Masahiro Ogasawara, Keizo Hirose, Kazuya Nagaseki, Makoto Aoki | 1999-07-06 |
| 5343047 | Ion implantation system | Hiroo Ono, Shuji Kikuchi, Masayuki Tomoyasu, Naoki Takayama | 1994-08-30 |