KT

Kazuhiro Tahara

TL Tokyo Electron Limited: 6 patents #1,241 of 5,567Top 25%
TL Tokyo Electron Yamanashi Limited: 1 patents #52 of 138Top 40%
Overall (All Time): #880,038 of 4,157,543Top 25%
6
Patents All Time

Issued Patents All Time

Showing 1–6 of 6 patents

Patent #TitleCo-InventorsDate
6544380 Plasma treatment method and apparatus Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Yukio Naito +6 more 2003-04-08
6391147 Plasma treatment method and apparatus Kosuke Imafuku, Shosuke Endo, Yukio Naito, Kazuya Nagaseki, Keizo Hirose 2002-05-21
6264788 Plasma treatment method and apparatus Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Yukio Naito +6 more 2001-07-24
6106737 Plasma treatment method utilizing an amplitude-modulated high frequency power Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Yukio Naito +6 more 2000-08-22
6074518 Plasma processing apparatus Kosuke Imafuku, Shosuke Endo, Hiroshi Tsuchiya, Masayuki Tomoyasu, Yukio Naito +6 more 2000-06-13
5698062 Plasma treatment apparatus and method Takao Sakamoto, Kenji Momose, Kosuke Imafuku, Shosuke Endo, Yukio Naito +2 more 1997-12-16