Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7337745 | Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor | Mitsuaki Komino, Hideaki Amano, Toshiaki Fujisato, Yasuharu Sasaki | 2008-03-04 |
| 6544380 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Kazuhiro Tahara, Yukio Naito +6 more | 2003-04-08 |
| 6391147 | Plasma treatment method and apparatus | Kosuke Imafuku, Kazuhiro Tahara, Yukio Naito, Kazuya Nagaseki, Keizo Hirose | 2002-05-21 |
| 6264788 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Kazuhiro Tahara, Yukio Naito +6 more | 2001-07-24 |
| 6106737 | Plasma treatment method utilizing an amplitude-modulated high frequency power | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Kazuhiro Tahara, Yukio Naito +6 more | 2000-08-22 |
| 6074518 | Plasma processing apparatus | Kosuke Imafuku, Kazuhiro Tahara, Hiroshi Tsuchiya, Masayuki Tomoyasu, Yukio Naito +6 more | 2000-06-13 |
| 6035804 | Process chamber apparatus | Junichi Arami | 2000-03-14 |
| D411516 | Gas diffusion plate for electrode of semiconductor wafer processing apparatus | Kosuke Imafuku, Kazuo Fukasawa | 1999-06-29 |
| 5698062 | Plasma treatment apparatus and method | Takao Sakamoto, Kazuhiro Tahara, Kenji Momose, Kosuke Imafuku, Yukio Naito +2 more | 1997-12-16 |