Issued Patents All Time
Showing 1–25 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293903 | Substrate support and plasma processing apparatus | Hajime Tamura, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2025-05-06 |
| 12288713 | Mounting table and plasma processing apparatus | Daiki Satoh, Akira Nagayama | 2025-04-29 |
| 12272528 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2025-04-08 |
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Taketoshi TOMIOKA, Shin Yamaguchi | 2024-12-10 |
| 12046457 | Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method | Shoichiro Matsuyama, Yohei Uchida | 2024-07-23 |
| 12033886 | Plasma processing apparatus and method for manufacturing mounting stage | Ryo CHIBA, Akira Nagayama | 2024-07-09 |
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yohei Uchida | 2024-05-14 |
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2024-03-19 |
| 11923171 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Hidetoshi Hanaoka, Tomohiko Akiyama | 2024-03-05 |
| 11908666 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2024-02-20 |
| 11894218 | Electrostatic chuck, support platform, and plasma processing apparatus | Masato Takayama | 2024-02-06 |
| D1012051 | Electrostatic chuck for semiconductor manufacturing device | Masato Takayama | 2024-01-23 |
| 11830751 | Plasma processing apparatus and plasma processing method | Shoichiro Matsuyama, Daiki Satoh, Takashi Nishijima, Jinyoung Park | 2023-11-28 |
| 11798791 | Substrate support and plasma processing apparatus | Shingo KOIWA | 2023-10-24 |
| 11791139 | Substrate support | Shin Yamaguchi, Koei ITO | 2023-10-17 |
| 11764038 | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program | Shoichiro Matsuyama, Naoki Tamaru | 2023-09-19 |
| D992615 | Focus ring | Yohei Uchida, Hikaru Abe, Tomoya Ujiie | 2023-07-18 |
| D992614 | Focus ring | Yohei Uchida, Masato Takayama | 2023-07-18 |
| 11688587 | Substrate support assembly, plasma processing apparatus, and plasma processing method | Masashi IKEGAMI | 2023-06-27 |
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Toshiya Tsukahara, Mitsuaki Sato | 2023-05-30 |
| 11600471 | Substrate support, plasma processing apparatus, and focus ring | Yohei Uchida | 2023-03-07 |
| 11538715 | Stage and substrate processing apparatus | Ryo CHIBA, Akira Nagayama | 2022-12-27 |
| 11538668 | Mounting stage, substrate processing device, and edge ring | Kyo Tsuboi, Tomoya Kato, Shoichiro Matsuyama | 2022-12-27 |
| 11521886 | Substrate processing apparatus and substrate support | Taketoshi TOMIOKA, Hiroki Kishi, Jisoo SUH | 2022-12-06 |
| 11437223 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2022-09-06 |