Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521886 | Substrate processing apparatus and substrate support | Yasuharu Sasaki, Taketoshi TOMIOKA, Hiroki Kishi | 2022-12-06 |
| 10825709 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Hiroki Kishi | 2020-11-03 |
| 10755902 | Plasma processing apparatus and focus ring | Hiroki Kishi | 2020-08-25 |
| 10269607 | Electrostatic chucking method and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Hiroki Kishi | 2019-04-23 |
| 10103011 | Plasma processing method and plasma processing apparatus | Hiroki Kishi | 2018-10-16 |